Microfabrication and nanomanufacturing

Cover of: Microfabrication and nanomanufacturing |

Published by Taylor & Francis in Boca Raton, FL .

Written in English

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Subjects:

  • Microelectronics.,
  • Integrated circuits -- Design and construction.,
  • Microelectromechanical systems -- Design and construction.

Edition Notes

Includes bibliographical references and index.

Book details

Statement[edited by] Mark J. Jackson.
ContributionsJackson, Mark J.
Classifications
LC ClassificationsTK7836 .M523 2005
The Physical Object
Paginationp. cm.
ID Numbers
Open LibraryOL3425706M
ISBN 100824724313
LC Control Number2005049275

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Keywords Bulk manufacturing Microfabrication techniques Microstructures Nano and microgrinding Nanofabrication techniques Soft lithography Surface micromachining Thin films X-ray lithography.

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